Electrochemical deposition of copper on n-Si/TiN
- Oskam, G
- Vereecken, PM
- Long, JG
- Moran, BJ
- Searson, PC
- Andricacos, PC (coord.)
- Dukovic, JO (coord.)
- Mathad, GS (coord.)
- Oleszek, GM (coord.)
- Rathore, HS (coord.)
- Simpson, CR (coord.)
ISBN: 1-56677-200-1
Argitalpen urtea: 1999
Alea: 98
Zenbakia: 6
Orrialdeak: 84-91
Biltzarra: Symposium on Electrochemical Processing in ULSI Fabrication I at the 193rd Meeting of the Electrochemical-Society
Mota: Biltzar ekarpena