Capacitive pressure sensor and characterization as RF MEMS device
- Bolea, R.G.
- Luque, A.
- Quero, J.M.
Aktak:
IEEE International Symposium on Industrial Electronics
ISBN: 9781424407552
Argitalpen urtea: 2007
Orrialdeak: 3267-3272
Mota: Biltzar ekarpena