Raquel Del Pilar
González Bolea
Publicacións (3) Publicacións de Raquel Del Pilar González Bolea
2007
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Capacitive pressure sensor and characterization as RF MEMS device
IEEE International Symposium on Industrial Electronics
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Single-wafer pressure capacitive sensor
Proceedings - IEEE International Symposium on Circuits and Systems
2006
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Capacitive pressure microsensor fabricated by bulk micromachining and sacrificial layer etching
IECON Proceedings (Industrial Electronics Conference)