Conference papers (2) Publications in which a researcher has participated

1999

  1. Electrochemical deposition of copper on n-Si/TiN

    PROCEEDINGS OF THE SYMPOSIA ON ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION I AND INTERCONNECT AND CONTACT METALLIZATION: MATERIALS, PROCESSES, AND RELIABILITY

  2. Electrochemical deposition of gold on N-type silicon

    ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION AND SEMICONDUCTOR/METAL DEPOSITION II, PROCEEDINGS