Electrodeposition of Copper on Silicon from Sulfate Solution

  1. Ji, C.
  2. Oskam, G.
  3. Searson, P.C.
Journal:
Journal of the Electrochemical Society

ISSN: 0013-4651

Year of publication: 2001

Volume: 148

Issue: 11

Type: Article

DOI: 10.1149/1.1410969 GOOGLE SCHOLAR