Electrodeposition of Copper on Silicon from Sulfate Solution

  1. Ji, C.
  2. Oskam, G.
  3. Searson, P.C.
Revue:
Journal of the Electrochemical Society

ISSN: 0013-4651

Année de publication: 2001

Volumen: 148

Número: 11

Type: Article

DOI: 10.1149/1.1410969 GOOGLE SCHOLAR