Capacitive pressure microsensor fabricated by bulk micromachining and sacrificial layer etching

  1. Luque, A.
  2. Bolea, R.G.
  3. Fernández-Bolaños, M.
  4. Ionescu, A.
  5. Quero, J.M.
Proceedings:
IECON Proceedings (Industrial Electronics Conference)

ISBN: 9781424401369

Year of publication: 2006

Pages: 2969-2974

Type: Conference paper

DOI: 10.1109/IECON.2006.348052 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus