Capacitive pressure microsensor fabricated by bulk micromachining and sacrificial layer etching
- Luque, A.
- Bolea, R.G.
- Fernández-Bolaños, M.
- Ionescu, A.
- Quero, J.M.
Aktak:
IECON Proceedings (Industrial Electronics Conference)
ISBN: 9781424401369
Argitalpen urtea: 2006
Orrialdeak: 2969-2974
Mota: Biltzar ekarpena