Raquel Del Pilar
González Bolea
École Polytechnique Fédérale de Lausanne
Lausana, SuizaÉcole Polytechnique Fédérale de Lausanne-ko ikertzaileekin lankidetzan egindako argitalpenak (1)
2006
-
Capacitive pressure microsensor fabricated by bulk micromachining and sacrificial layer etching
IECON Proceedings (Industrial Electronics Conference)