Electrodeposition of copper in trenches from a citrate plating bath
- Lizama Tzec, F.I.
- Oskam, G.
ISSN: 1938-6737, 1938-5862
ISBN: 9781566778008
Year of publication: 2009
Volume: 25
Issue: 27
Pages: 195-201
Type: Conference paper
Proceedings:
ECS Transactions