Characterization of silicon surfaces in HF solution using microwave reflectivity

  1. Natarajan, A.
  2. Oskam, G.
  3. Searson, P.C.
Revue:
Journal of Applied Physics

ISSN: 0021-8979

Année de publication: 1998

Volumen: 83

Número: 4

Pages: 2112-2120

Type: Article

DOI: 10.1063/1.366945 GOOGLE SCHOLAR
La source de données: Scopus