Electrochemical deposition of gold on N-type silicon

  1. Oskam, G
  2. Searson, PC
Book Series:
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION AND SEMICONDUCTOR/METAL DEPOSITION II, PROCEEDINGS
  1. Andricacos, PC (coord.)
  2. Searson, PC (coord.)
  3. ReidsemaSimpson, C (coord.)
  4. Allongue, P (coord.)
  5. Stickney, JL (coord.)
  6. Oleszek, GM (coord.)

ISBN: 1-56677-231-1

Year of publication: 1999

Volume: 99

Issue: 9

Pages: 318-328

Congress: International Symposium on Electrochemical Processing in ULSI Fabrication II

Type: Conference paper

GOOGLE SCHOLAR
Data source: WoS