Electrochemical deposition of gold on N-type silicon

  1. Oskam, G
  2. Searson, PC
Collection de livres:
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION AND SEMICONDUCTOR/METAL DEPOSITION II, PROCEEDINGS
  1. Andricacos, PC (coord.)
  2. Searson, PC (coord.)
  3. ReidsemaSimpson, C (coord.)
  4. Allongue, P (coord.)
  5. Stickney, JL (coord.)
  6. Oleszek, GM (coord.)

ISBN: 1-56677-231-1

Année de publication: 1999

Volumen: 99

Número: 9

Pages: 318-328

Congreso: International Symposium on Electrochemical Processing in ULSI Fabrication II

Type: Communication dans un congrès

GOOGLE SCHOLAR
La source de données: WoS