Electrochemical deposition of gold on N-type silicon

  1. Oskam, G
  2. Searson, PC
Liburu bilduma:
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION AND SEMICONDUCTOR/METAL DEPOSITION II, PROCEEDINGS
  1. Andricacos, PC (coord.)
  2. Searson, PC (coord.)
  3. ReidsemaSimpson, C (coord.)
  4. Allongue, P (coord.)
  5. Stickney, JL (coord.)
  6. Oleszek, GM (coord.)

ISBN: 1-56677-231-1

Argitalpen urtea: 1999

Alea: 99

Zenbakia: 9

Orrialdeak: 318-328

Biltzarra: International Symposium on Electrochemical Processing in ULSI Fabrication II

Mota: Biltzar ekarpena

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Datuen iturria: WoS