Electrodeposition of copper into trenches from a citrate plating bath

  1. Lizama-Tzec, F.I.
  2. Canché-Canul, L.
  3. Oskam, G.
Journal:
Electrochimica Acta

ISSN: 0013-4686

Year of publication: 2011

Volume: 56

Issue: 25

Pages: 9391-9396

Type: Article

DOI: 10.1016/J.ELECTACTA.2011.08.023 GOOGLE SCHOLAR
Data source: Scopus