Electrodeposition of copper into trenches from a citrate plating bath
- Lizama-Tzec, F.I.
- Canché-Canul, L.
- Oskam, G.
ISSN: 0013-4686
Année de publication: 2011
Volumen: 56
Número: 25
Pages: 9391-9396
Type: Article
Revue:
Electrochimica Acta