Electrochemical deposition of copper on n-Si/TiN

  1. Oskam, G.
  2. Vereecken, P.M.
  3. Searson, P.C.
Journal:
Journal of the Electrochemical Society

ISSN: 0013-4651

Year of publication: 1999

Volume: 146

Issue: 4

Pages: 1436-1441

Type: Article

DOI: 10.1149/1.1391782 GOOGLE SCHOLAR
Data source: Scopus