Electrochemical deposition of copper on n-Si/TiN
- Oskam, G.
- Vereecken, P.M.
- Searson, P.C.
ISSN: 0013-4651
Année de publication: 1999
Volumen: 146
Número: 4
Pages: 1436-1441
Type: Article
Revue:
Journal of the Electrochemical Society