Characterization of silicon surfaces in HF solution using microwave reflectivity
- Natarajan, A.
- Oskam, G.
- Searson, P.C.
ISSN: 0021-8979
Year of publication: 1998
Volume: 83
Issue: 4
Pages: 2112-2120
Type: Article
ISSN: 0021-8979
Year of publication: 1998
Volume: 83
Issue: 4
Pages: 2112-2120
Type: Article